FXLS93421 datasheet(18/254 Pages) NXP

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NXP Semiconductors

FXLS9xxxx

Dual channel inertial sensor

VBUS_I_L_min ≤ (VBUS_I – VSS) ≤ VBUS_I_H_max, TL ≤ TA ≤ TH, ΔT ≤ 25 °C/min, unless otherwise specified

Characteristic

Symbol

Min

Typ

Max

Units

Test

notes

Non-Linearity (12 bit, lateral, or Z-Axis, All Ranges)

10669

Differential Non-Linearity (No Missing Codes)

DNL

—

+1.0

LSB

10670

End Point Non-Linearity (Least Squares BFSL)

INL

—

+20.0

LSB

Supply Coupling (CBUF = 1 µf, 12 bit, DSI3, PSI5, lateral, or Z-Axis, All Ranges)

10663

1 kHz ≤ fn ≤ 10 kHz, BUS_I = 8.0 V ± 2.0 V (Represents PSI5 Sync Pulse)

PSCPSI5

—

LSB

10682

10 kHz ≤ fn ≤ 100 kHz, BUS_I = 6.0 V ± 1.0 V (Represents DSI3 BRC)

PSCDSI3C

—

LSB

10681

100 kHz ≤ fn ≤ 1 MHz, BUS_I = 6.0 V ± 0.5 V (Represents DSI3/PSI5

Response)

PSCDSI3R

—

LSB

10680

1 MHz ≤ fn ≤ 20 MHz, BUS_I = 6.0 V ± 0.1 V(Represents Response

Harmonics)

PSCSATH

—

LSB

Supply Coupling (CBUF = 0.1 µf, 12 bit, SPI, lateral, or Z-Axis, All Ranges)

10675

1 kHz ≤ fn ≤ 20 MHz, VBUF = 5.0 V ± 0.1 V

PSCSPI5

—

LSB

10683

1 kHz ≤ fn ≤ 20 MHz, VBUF = 3.3 V ± 0.1 V

PSCSPI3

—

LSB

Noise: Lateral Sensor

System Output Noise Peak (12 bit), High g Range = 125 g, Lateral

10653

Max. Deviation from Mean, Min. 2000 values, Min. fSamp = 2 kHz, LPF =

400 Hz, 4-Pole

nPeakX_400C

–4

—

LSB

10655

Max. Deviation from Mean, Min. 50 values, Min. fSamp = 2 kHz, LPF = 400

Hz, 4-Pole

nPeakX_400T

–4

—

LSB

System Output Noise Average (12 bit), High g Range = 125 g, Lateral

10654

Standard Deviation, Min. 2000 values, Min. fSamp = 2 kHz, LPF = 400 Hz,

4-Pole

nRMSX_400C

—

+1.0

LSB

10656

Standard Deviation, Min. 50 values, Min. fSamp = 2 kHz, LPF = 400 Hz, 4-

Pole

nRMSX_400T

—

+1.0

LSB

Noise: Z-Axis Sensor

System Output Noise Peak (12 bit), High g Range = 125 g, Z-Axis

10659

Max. Deviation from Mean, Min. 2000 values, Min. fSamp = 2 kHz, LPF =

400 Hz, 4-Pole

nPeakZ_400C

–8

—

LSB

10661

Max. Deviation from Mean, Min. 50 values, Min. fSamp = 2 kHz, LPF = 400

Hz, 4-Pole

nPeakZ_400T

–8

—

LSB

System Output Noise Average (12 bit), High g Range = 125 g, Z-Axis

10660

Standard Deviation, Min. 2000 values, Min. fSamp = 2 kHz, LPF = 400 Hz,

4-Pole

nRMSZ_400C

—

+2.0

LSB

10662

Standard Deviation, Min. 50 values, Min. fSamp = 2 kHz, LPF = 400 Hz, 4-

Pole

nRMSZ_400T

—

+2.0

LSB

Table 17. Electrical characteristics - inertial sensor signal chain: High g...continued

The offset before offset cancellation scales with the user gain. The higher the gain (lower

range), the higher the offset. Table 18 lists the adjusted offset specification limits for some

SPI and DSI3 12-bit user gain settings.

User range (g)

Offset (LSB, 12 bit)

± 200

± 167

± 162

62.5

± 160

Table 18. High g adjusted offset specification limits

FXLS9xxxx

All information provided in this document is subject to legal disclaimers.

Product data sheet

Rev. 6 — 8 February 2021

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