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Motorola Sensor Device Data

10 kPa On-Chip Temperature

Compensated & Calibrated

Silicon Pressure Sensors

The MPX2010/MPXV2010G series silicon

piezoresistive pressure sensors provide a very

ac c u rate and linear voltage output — direc tly

proportional to the applied pressure. These sensors

house a single monolithic silicon die with the strain

gauge and thin–film resistor network integrated on

each chip. The sensor is laser trimmed for precise

s pan, of fs et calibration and temperature

compensation.

Features

• Temperature Compensated over 0°C to +85°C

• Ratiometric to Supply Voltage

• Differential and Gauge Options

Application Examples

• Respiratory Diagnostics

• Air Movement Control

• Controllers

• Pressure Switching

Figure 1 shows a block diagram of the internal

circuitry on the stand–alone pressure sensor chip.

Figure 1. Temperature Compensated and Calibrated

Pressure Sensor Schematic

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SENSING

ELEMENT

THIN FILM

TEMPERATURE

COMPENSATION

AND

CALIBRATION

CIRCUITRY

2

4

1

GND

VOLTAGE OUTPUT versus

APPLIED DIFFERENTIAL PRESSURE

The output voltage of the differential or gauge sensor

increases with increasing pressure applied to the

pressure side (P1) relative to the vacuum side (P2).

Similarly, output voltage increases as increasing vacu-

um is applied to the vacuum side (P2) relative to the

pressure side (P1).

Preferred devices are Motorola recommended choices for future use and

best overall value.

Order this document

by MPX2010/D

MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

SMALL OUTLINE PACKAGE

SURFACE MOUNT

UNIBODY PACKAGE

MPX2010GP

CASE 344B

MPX2010GSX

CASE 344F

PIN NUMBER

NOTE: Pin 1 is noted by the notch in

the lead.

1

2

3

Gnd

5

6

7

N/C

N/C

N/C

8

N/C

MPX2010D

CASE 344

MPX2010DP

CASE 344C

MPX2010GS

CASE 344E

MPXV2010DP

CASE 1351

MPXV2010GP

CASE 1369

MPX2010

MPXV2010G

SERIES

COMPENSATED

PRESSURE SENSOR

0 to 10 kPa (0 to 1.45 psi)

FULL SCALE SPAN: 25 mV

Motorola Preferred Device

PIN NUMBER

1

2

Gnd

3

4

NOTE: Pin 1 is noted by the notch in

the lead.

REV 9

Freescale Semiconductor, Inc.

For More Information On This Product,

Go to: www.freescale.com