1

Motorola Sensor Device Data

10 kPa

Uncompensated

Silicon Pressure Sensors

The MPX10 series device is a silicon piezoresistive pressure sensor providing a very

accurate and linear voltage output — directly proportional to the applied pressure. This

standard, low cost, uncompensated sensor permits manufacturers to design and add

their own external temperature compensating and signal conditioning networks.

Compensation techniques are simplified because of the predictability of Motorola’s single

element strain gauge design.

Features

• Low Cost

• Patented Silicon Shear Stress Strain Gauge Design

• Ratiometric to Supply Voltage

• Easy to Use Chip Carrier Package Options

• Differential and Gauge Options

Application Examples

• Air Movement Control

• Environmental Control Systems

• Level Indicators

• Leak Detection

• Medical Instrumentation

• Industrial Controls

• Pneumatic Control Systems

• Robotics

Figure 1 shows a schematic of the internal circuitry on the stand–alone pressure

sensor chip.

Figure 1. Uncompensated Pressure Sensor Schematic

PIN 3

X–ducer

PIN 2

PIN 4

+ Vout

– Vout

+ VS

PIN 1

VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE

The differential voltage output of the X–ducer is directly proportional to the differential

pressure applied.

The output voltage of the differential or gauge sensor increases with increasing

pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,

output voltage increases as increasing vacuum is applied to the vacuum side (P2)

relative to the pressure side (P1).

Senseon and X–ducer are trademarks of Motorola, Inc.

Order this document

by MPX10/D

MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

MPX10

SERIES

0 to 10 kPa (0 – 1.45 psi)

35 mV FULL SCALE SPAN

(TYPICAL)

NOTE: Pin 1 is the notched pin.

PIN NUMBER

BASIC CHIP

CARRIER ELEMENT

CASE 344–15, STYLE 1

DIFFERENTIAL

PORT OPTION

CASE 344C–01, STYLE 1

1

2

Gnd

+Vout

3

4

VS

–Vout

REV 5