2

MEMS Mass Flow Sensor

D6F-03A3-000

■ Electrical Performance

Recommended operation condition and DC characteristic

■ Basic Performance

0 to 3L/min. (Normal) volumetric flow rate at 0

° C, 101.3kPa.

Measurement condition: Power-supply voltage 12 ±0.1VDC, ambient temperature 25 ±5

° C and ambient air humidity 25 to 75% RH.

D6F-03A3-000

■ Characteristics

■ Precautions

1. Avoid use in excessively dirty, wet environments

2. Do not use in the presence of flammable gases (e.g. hydrogen,

methane, ethane) and liquefied petroleum gas. In addition, do not

use with corrosive gases (e.g. chlorine, sulphur, acids, alkalis,

etc.).

3. Install in the direction of the arrow indicated.

4. For best results (optimum accuracy), mount horizontally.

5. Use four suitable M3 screws for mounting. Do not exceed a fixing

torque of 0.59 Nm.

6. Do not modify D6F- in any way.

7. Do not place any object in or close to the inlet and outlet orifices.

8. Do not use the sensor in any of the following environments:

• a location that receives radiant heat from the sun or apparatus

• a place where intense light may radiate down

• where fast changing temperatures occur

• locations prone to freezing, high humidity, condensation

• places where large magnitudes of vibration or shock could occur

9. Noise countermeasures: VERY IMPORTANT: Take suitable pre-

cautions to minimize the effects and potential for induced electri-

cal noise. Install away from apparatus that generates strong high

frequencies, surges and spikes. Take particular care to install

away from AC power transformers, live mains power lines and

high power magnetic circuits. Attach a surge suppressor and a

noise filter to the peripheral equipment.

10.Ensure good grounding is achieved by grounding the GND termi-

nal to the peripheral equipment’s main ground frame connection

and its associated regulated power supply.

11.Do not make a direct solder connection to the integral terminals. It

is recommended you use the optional cable ‘D6F-CABLE2’ for

attachment and to ensure correct connection.

12.D6F- is a precision component. Keep in original packaging and

remove only when ready for installation. Damage may occur if

subjected to excessive force (e.g. dropped or kicked). Any item

suspected to be damaged should be discarded.

13.Immediately following installation, a qualified person should per-

form checks to ensure safe, satisfactory operation.

Item

Term

Condition

MIN

TYP

MAX

Unit

Power-supply voltage

V

CC

—

10.8—

26.4VDC

Operating temperature

T

OPR

—0

—

50

° C

Maximum output voltage

V

OH

Load resistance 10k

Ω

5—

5.7

VDC

Minimum output voltage

V

OL

Load resistance 10k

Ω

0—

1VDC

Flow Rate L/min (normal)

0

0.6

1.2

1.8

2.4

3.0

Output Voltage (VDC)

1.00 ±0.2

2.83 ±0.2

3.77 ±0.2

4.34 ±0.2

4.72 ±0.2

5.00 ±0.2

Degree of Protection

IP40

Applicable Gas

Air

Electrical Connection

Connector (3 wire)

Output Signal

Analog, 1-5VDC (load resistance 10k

Ω min)

Current Consumption

Max 15mA (no load, V

Repeat Accuracy

±5% FSD max, 25

° C

Insulation Resistance

20Mohm min. (500VDC between lead terminals and case)

Dielectric Strength

500VAC, 50/60Hz for 1 minute (leakage current typ. <1mA) between lead terminals and case

Withstand Pressure

200 kPa

Operating Temperature

0 to 50

° C (with no ice or dew condensation)

Operating Humidity

85%RH max. (with no ice or dew condensation)

Storage Temperature

-10 to 60

° C (with no ice or dew condensation)

Storage Humidity

85%RH max. (with no ice or dew condensation)

Weight

5.27g