DA79005_000.doc

May 07, 2009

1/5

000790051447

ECN 1186

MS79005

PRESSURE SENSOR DIE (0-0.5 BAR)

• 0 to 50 kPa range (500 mbar or 7.5 PSI)

• Absolute/differential pressure sensors

• RoHS-compatible & Pb-free

1

DESCRIPTION

The sensor element of the MS79005 consists of a silicon micro-machined membrane. Implanted resistors make

use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This

sensor, which has outstanding linearity and span values, is available in various configurations. The absolute

pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer

used for this sealing has a thickness of 0.2 mm (MS79005-A_0.2) or 0.5 mm (MS79005-A_0.5). Two gauge

versions available: one with a drilled Pyrex glass (MS79005-D) and the other without Pyrex glass (MS79005-S).

FEATURES

•

Uncompensated pressure sensor die

•

Linearity 0.05% (typical)

•

Output Span 150mV @ 5V

•

Very small Die Size 1.78 x 1.78mm (MS79005-A)

•

Temperature Range -40°…+125°C

•

Low Cost, High reliability

APPLICATION

•

For absolute or differential pressure sensor systems

•

Variometers

ELECTRICAL CONNECTIONS

Positive output for pressure applied topside

bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers

(PBDE).

Vs+ : Supply voltage of Wheatstone bridge

Epi : Connection of epitaxial layer (membrane)

Out- : Negative output

Out+ : Positive output

GND1 : Ground

GND2 : Ground

R5+ : Reference Resistor 5: positive access

R5- : Reference Resistor 5: negative access

R6+ : Reference Resistor 6: positive access

R6- : Reference Resistor 6: negative access

Vs+ / EPI

GND2

GND1

Out+

Out-

R5+

R5-

R6-

R6+

R5 and R6 are

placed on bulk