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LIS3LV02DL bảng dữ liệu(PDF) 19 Page - STMicroelectronics

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Giải thích chi tiết về linh kiện  MEMS inertial sensor 3-axis - ±2g/±6g digital output low voltage linear accelerometer
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LIS3LV02DL
Functionality
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3
Functionality
The LIS3LV02DL is a high performance, low-power, digital output 3-axis linear
accelerometer packaged in an LGA package. The complete device includes a sensing
element and an IC interface able to take the information from the sensing element and to
provide a signal to the external world through an I2C/SPI serial interface.
3.1
Sensing element
A proprietary process is used to create a surface micro-machined accelerometer. The
technology allows to carry out suspended silicon structures which are attached to the
substrate in a few points called anchors and are free to move in the direction of the sensed
acceleration. To be compatible with the traditional packaging techniques a cap is placed on
top of the sensing element to avoid blocking the moving parts during the moulding phase of
the plastic encapsulation.
When an acceleration is applied to the sensor the proof mass displaces from its nominal
position, causing an imbalance in the capacitive half-bridge. This imbalance is measured
using charge integration in response to a voltage pulse applied to the sense capacitor.
At steady state the nominal value of the capacitors are few pF and when an acceleration is
applied the maximum variation of the capacitive load is up to 100fF.
3.2
IC interface
The complete measurement chain is composed by a low-noise capacitive amplifier which
converts into an analog voltage the capacitive unbalancing of the MEMS sensor and by
three
Σ∆ analog-to-digital converters, one for each axis, that translate the produced signal
into a digital bitstream.
The
Σ∆ converters are coupled with dedicated reconstruction filters which remove the high
frequency components of the quantization noise and provide low rate and high resolution
digital words.
The charge amplifier and the
Σ∆ converters are operated respectively at 61.5 kHz and
20.5 kHz.
The data rate at the output of the reconstruction depends on the user selected Decimation
Factor (DF) and spans from 40 Hz to 2560 Hz.
The acceleration data may be accessed through an I2C/SPI interface thus making the
device particularly suitable for direct interfacing with a microcontroller.
The LIS3LV02DL features a Data-Ready signal (RDY) which indicates when a new set of
measured acceleration data is available thus simplifying data synchronization in digital
system employing the device itself.
The LIS3LV02DL may also be configured to generate an inertial Wake-Up, Direction
Detection and Free-Fall interrupt signal accordingly to a programmed acceleration event
along the enabled axes.



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