AMS 6916

Board mount pressure sensor with ratiometric analog output

April 2019

– Rev. 1.0, preliminary

Page 4/9

www.analog-micro.com

5)

The overall error (TEB) is defined as the measurement value

’s maximum deviation from the ideal characteristic

curve in %FSO in the temperature range of 0

… 60 °C.

6)

The long term stability is tested on a sample base.

7)

The ratiometricity error is defined as the maximum deviation of the measurement output voltage at a supply

voltage VS from the measurement output voltage at 5 V supply multiplied with VS / 5 V at room temperature (RT)

in %FSO at any pressure within the specified range. VS has to be in the specified range.

8)

A load resistor of RL = 10 kΩ is recommended, if the diagnostic feature is used to detect a power loss.

9)

Media compatibility of pressure port 1 (for a description of port 1, see Figure 3): fluids and gases non-corrosive to

LCP, silicon, Pyrex, RTV silicone rubber and epoxy.

10) Media compatibility of pressure port 2 (for a description of port 2, see Figure 3): clean, dry gases, non-corrosive to

LCP, silicon, RTV silicone rubber, epoxy, gold (alkaline or acidic liquids can destroy the sensor).

FUNCTIONAL DESCRIPTION

The pressure sensors from the AMS 6916 series combine a high quality, piezoresistive MEMS silicon sens-

ing element with a modern mixed-signal CMOS ASIC for digital signal-conditioning on a ceramic substrate.

This combination enables high precision measurements and excellent drift and long-term stability.

The functional principle of the AMS 6916 sensors is explained using Figure 1.

The physical pressure measurement is done at AMS 6916's piezoresistive pressure sensing element, which

converts the applied pressure into a differential voltage signal almost proportional to the applied pressure.

This differential voltage signal is corrected and conditioned by the connected ASIC in multiple steps.

At first the differential voltage signal from the sensing element is pre-amplified by the ASIC

’s amplifier block

(Amp) and transmitted to the integrated A/D converter (ADC) by the multiplexer stage (MUX). The ADC

converts this voltage signal into a digital value with a resolution of 14 bit. This digitized pressure signal is

corrected and calibrated in the subsequent ASIC microcontroller (uC) block.

Figure 1: Functional principle