SCR100

Nanopositioning Stage

Like its relatives, the SCR100 integrates a slide guide, encoder, and a Linear Shaft Motor. A wide

range of options allows for a better match for stage applications needing sub-nanometer

resolution that is free from motion errors. Like the SCR050 and SCR075, the encoder and

motor cables are built into the stationary base and are designed so there is no need for

them to bend and flex.

Each SCR stage requires a servo driver to operate the stage. Any two SCR stages will

bolt directly together to form a very stiff, compact X-Y assembly, without the need for

adaptor plates. Two SCR stages can be supplied as an X-Y stage to insure true orthogonal

orientation between the two axes.

Specifications1

Units SCR100-050 SCR100-100 SCR100-150 SCR100-200 SCR100-250 SCR100-300

Travel/Stroke

mm

50

100

150

200

250

300

Stage Width (B)

mm

140

190

240

290

340

390

Accuracy

μm

3

5

7

9

11

12

Encoder Resolution

nm

1000, 500, 100, 50, 10

Bi-Directional Repeatability2

±1 count

Maximum Acceleration

m/s2

17

12

10

8

7

6

Maximum Velocity3

m/s

0.9

1

1.2

1.2

1.3

1.3

Load Capacity4

kg

45.5

Moving Mass

kg

0.8

1.1

1.3

1.6

2.0

2.2

Total Mass

kg

1.6

2.1

2.6

3.2

3.9

4.5

Straightness & Flatness

μm

2/25mm

Home Limit Switches

Standard

Home Switch Location

Center

Limit Switch Over Travel

mm

1

Hard Stop Over Travel

mm

2

Bearing

Cross-roller bearing

Linear Shaft Motor

S080Q

Note 1: Standard stage specifications are based on the S080Q Linear Shaft Motor

Note 2: Repeatability +/- 2 counts at sub 0.1μm resolutions

Note 3: For 10nm (0.01μm) resolution, max velocity of encoder is limited to 135mm/sec; for 50nm (0.05μm), the limit is 675mm/sec;

and for 100nm (0.1μm), the limit is 1350mm/sec

Note 4: Please contact our Applications Engineers for loads exceeding 45.5kg

SCR100-100

0.10

1.00

10.00

100.00

0.0

9.1

18.2

27.3

36.4

45.5

Load Mass

0

200

400

600

800

1000

1200

Acceleration Q coil

Max Velocity Q coil

SCR100-200

0.10

1.00

10.00

0.0

9.1

18.2

27.3

36.4

45.5

Load Mass

0

200

400

600

800

1000

1200

1400

Acceleration Q coil

Max Velocity Q coil

SCR100-300

0.10

1.00

10.00

0.0

9.1

18.2

27.3

36.4

45.5

Load Mass

0

200

400

600

800

1000

1200

1400

Acceleration Q coil

Max Velocity Q coil

SCR100-050

0.10

1.00

10.00

100.00

0.0

9.1

18.2

27.3

36.4

45.5

Load Mass

0

100

200

300

400

500

600

700

800

900

1000

Acceleration Q coil

Max Velocity Q coil

(kg)

(kg)

(kg)

(kg)

Acceleration/Velocity Curves

Stage Specifications

1

2

3

4

5

6

7

8

9

10

11

12

13

14

15

Pin

Signal

Function

2

0V

Ground

4

Z-

Reference Mark

5

B-

Incremental Signal

6

A-

Incremental Signal

7

5V

Power

8

5V

Power

9

0V

Ground

10

Q

Limit

11

P

Limit

12

Z+

Reference Mark

13

B+

Incremental Signal

14

A+

Incremental Signal

15

shield

Nippon Pulse

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