Liquid Flow Sensor Module

FS1023

Datasheet

© 2018 Integrated Device Technology, Inc.

1

October 10, 2018

Description

The FS1023 MEMS Liquid Flow Sensor Module measures the flow

rate using the thermo-transfer (calorimetric) principle. The FS1023

is designed to measure liquids. The sensor output is amplified and

trimmed at zero flow for module to module consistency.

The FS1023 offers key advantages over resistor-based flow

solutions. The sensor utilizes thermopile sensing, which provides

an excellent signal-to-noise ratio. The sensor comprises a “solid”

thermal isolation technology and silicon-carbide coating, which

protects it from abrasive wear and provides robustness and long-

term reliability. In comparison, other sensors typically contain a

fragile membrane above an etched cavity for the thermal isolation

base.

There are no moving mechanical parts that can break in contrast

to other flow meter types, such as a turbine-type meter. The

FS1023 has minimal flow resistance, making it highly suitable for

gravity-feed applications or for replacing a high-power pump with a

lower power device.

The FS1023 is a NSF-certified component.

Typical Applications



Beverage equipment



Liquid-dispensing system



Process controls and monitoring



Fluid leak detection

Features



Liquid flow: 0 to 3 liters/min



Robust “solid” isolation technology



Resistant to surface contamination



No cavity to cause clogging



Resistant to vibration and pressure shock



Low-power application



Minimal flow resistance



Fast response: < 5ms



Analog voltage output



Thermistor voltage output: 1V to 4.5V



Supply voltage: 5V



Module operating temperature range: 0°C to +85°C

FS1023 Flow Sensor Module