Specifications

Performance

Mass Range Options

1-100 amu standard; 1-200 amu, 1-300 amu optional

Detector System

Dual (Faraday and secondary electron multiplier)

Maximum Operating Pressure

7.6e-5 Torr (1e-4 mbar)

Minimum Detectable Partial Pressure

Faraday

2e-11 Torr (2.7e-11 mbar)

Secondary electron multiplier

5e-14 Torr (6.7e-14 mbar)

Mass Stability

Better than ±0.1 amu over 8 hours at stable ambient temperature

Resolution

Better than 10% valley between peaks of equal height throughout the mass range

Analyzer & Housing

Bakeout Temperature & Bakeout Jacket

Optional for 200°C bakeout. 175w at 100-120Vac or 200-240 Vac.

Mounting Flange

Ion Source

Open ion source

Filaments

Replaceable twin Tungsten or Thoria filaments

Vacuum Hardware

Analyzer housing plus pneumatic isolation valve. Optional independent total pressure

gauge and/or valve and filament trip-box assemblies available for interlocked protection of

the RGA.

Mass Filter

Double filter (1” RF only pre-filter with 4” main filter)

Pneumatics

60-80 psig CDA

Control Unit/PC

Control Module Weight

1.7 kg

Power

24 VDC, 3.4A, external supply (included), 100-120V/200-240V, 2.1 Amp, 47-63 Hz

Maximum Operating Conditions

Electronics: 10-40°C, 80% RH (non-condensing)

LED Status Indication

Interlock status, emission OK, SEM, power and communications

I/O Capability

4 analog inputs (-11 to +11v, 22 bit), 2 analog outputs (0-10V, 12 bit), 16 digital TTL

I/O, 1 opto-isolated filament control input, one dedicated gauge port

Optional PC based

Generic I/O support for PCI slots, USB and Ethernet I/O devices. Modbus/GEM SECS

support for some product configurations.

Other Facilities

Leak check headset socket, external filament trip and instrument reset

Software

Process Eye Professional fully network compatible control platform generating under

Communications

Ethernet CAT-5e

Minimum PC Specification Required

space drive. Multi-sensor installation may require higher specifications.

Simultaneous Multi-Sensor

Multi-Sensor Process Eye Professional client/server configuration offers flexible

multi-sensor operation

Total Shipping Weight

25 lbs (11.4 Kg)

Compliance

CE