e-Vision 2

STAbiliTY, ACCuRACY AnD SpEED

A COST EFFECTiVE RGA FOR

GEnERAl puRpOSE VACuuM AnAlYSiS

Residual Gas Analysis (RGA) is a routine workhorse tool for any vacuum engineer. The

ability to quickly determine the individual gas partial pressures within a vacuum chamber

provides a wealth of diagnostic information to help troubleshoot real and virtual leaks,

identify components with abnormal out-gassing, identify contaminants and confirm when

cryo-pumping and getter systems are close to needing regeneration. The e-Vision 2 RGA is

one of a new range of products, from MKS, designed to meet all the traditional requirements

for an RGA sensor but with data collection at speeds unachievable with previous generation

technologies. The e-Vision 2 RGA is designed to provide maximum value for money. The

e-Vision 2 is designed to collect data at millisecond speeds per data point even when

measuring data over the full dynamic range of the RGA. This capability has been achieved

without sacrificing any of the necessary robustness, reliability and support which have

served to make MKS the world leader in RGA products over the widest range of applications

— from semiconductor tools or particle accelerators to general industrial applications.

Applications

The e-Vision 2 is suitable for a wide range of

applications including:

• Leakdetectionofvacuumlines,welds

and seals

• Vacuumdiagnostics

• Pumpdownmonitoring

• Chamberbakeoutmonitoring

• Leakcheckingofcoolantlineswithina

vacuum chamber

• Chambercontaminantmonitoring

• Monitorcryo-pumpperformance

• Monitorgetterperformance

e-Vision 2 in use as a troubleshooting tool on vacuum-

based surface analysis equipment